COUNTERBEARING WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR COMPRISING SUCH A COUNTERBEARING AND METHOD FOR THE PRODUCTION THEREOF

摘要

A method for the production of a counterbearing with a membrane bed comprises the following steps: providing a counterbearing body comprising silicon and removing the silicon material by means of laser ablation from a surface of the counterbearing body. Preferably, the surface processed by laser ablation is additionally oxidized; and the processed and oxidized surface is etched. The resulting pressure sensor 1 comprises two counterbearings 2a, 2b with a membrane bed 6a, 6b, which has a contour for supporting a measurement membrane 3, wherein the contour substantially corresponds to the bending line of a measurement membrane 3.