| 摘要 |
<P>PROBLEM TO BE SOLVED: To recover a state enabling laser oscillation in a short time after a halt cancelling command. <P>SOLUTION: A gas laser apparatus includes: an air blower 30 for circulating a laser gas along a gas channel 101; a pressure detecting means 33 for detecting gas pressure of laser gas; gas supplying/exhausting means 51, 61, 62 for supplying/exhausting the laser gas to/from the gas channel 101; a command means 75 for commanding halt of laser oscillation; and a control means 70 for controlling the air blower 30 and the gas supplying/exhausting means 51, 61, 62 in accordance with the command from the command means 75. The control means 70 controls the gas supplying/exhausting means 51, 61, 62 before the halt command in such a way that the air blower 30 is rotated at a predetermined rotation speed N1 and the detected gas pressure P becomes a first target gas pressure P1, and controls the gas supplying/exhausting means 51, 61, 62 after the halt command in such a way that the rotation speed of the air blower 30 is reduced or the rotation is stopped and the detected gas pressure P becomes a second target gas pressure P2 corresponding to the first target gas pressure P1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
