| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new pad for placing a substrate, which is used for a robot hand for detachably transporting a tabular substrate, also has enhanced holding force to the substrate, high durability and a long life, and to provide a pad mechanism using the same. <P>SOLUTION: A pad 1 for placing a substrate includes an elastic outer layer 2 and a space 3 enclosed in the inner part of the outer layer 2. A face 4 which is a side of the outer layer coming in contact with the substrate specifically has a curved face convex to the outside. Accordingly, when the tabular substrate is placed, a contact area of the pad 1 with the substrate is increased by a load of the substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
