| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and a method for frequency adjustment that have high productivity and high precision with respect to a frequency adjustment method of a piezoelectric vibrator. <P>SOLUTION: The device which adjusts frequencies of piezoelectric vibrators includes a film formation source which sticks a film forming material on a plurality of piezoelectric vibrators, arrayed in an X-axial direction, with a predetermined rate, a shutter which shields/exposes film formation target parts of the plurality of arrayed piezoelectric vibrators, and a control unit which controls an opening/closing operation of the shutter. The control unit is configured to control the opening/closing operation of the shutter based upon necessary exposure time t(x) of each piezoelectric vibrator calculated from mass distributions M1(x) of the plurality of piezoelectric vibrators calculated from frequency distributions of the plurality of piezoelectric vibrators measured before the film formation. <P>COPYRIGHT: (C)2012,JPO&INPIT |
