ELECTROSTATIC CHUCKS AND METHODS FOR REFURBISHING SAME

摘要

Novel methods for extending electrostatic chuck lifetimes are provided. The methods involve providing a chuck having a metal cooling plate attached to a ceramic top plate via indium bonding, and after a period of use, disassembling the chuck, and providing a new chuck including the used metal cooling plate. In certain embodiments, the use of indium as a bond material uniquely allows the described disassembly and reassembly without damage to other parts of the chuck.