METHOD FOR CONTACTLESS MEASUREMENT OF LINEAR DIMENSIONS OF THREE-DIMENSIONAL OBJECTS

摘要

FIELD: physics. ^ SUBSTANCE: method for contactless measurement of linear dimensions of three-dimensional objects involves multiple formation of probing structured illumination on the surface of the object under test by illuminating the surface of the object under test with a beam of optical radiation and successive capturing of images of the structure of the probing illumination distorted by the relief of the surface of the object under test. For each point of the object under test, the dependence of the intensity of the picked up radiation from the number of the image is determined. Coordinates of the point of the object under test in space is determined via calibration with a calibration target. ^ EFFECT: simple calibration procedure, low cost of measurement, high accuracy and reliability of testing.