| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning electron microscope having excellent usability, and capable of certainly preventing contact between a sample to be observed and a structure in a sample chamber such as an objective lens. <P>SOLUTION: Object detecting means for detecting the presence/absence of the sample to be observed without contacting from a place near an inner wall of the sample chamber of the scanning electron microscope is provided. When the sample to be observed is introduced into the sample chamber, while a sample moving mechanism is automatically moved in a horizontal and vertical direction by sample moving mechanism controlling means, the height of the sample to be observed is automatically calculated on the basis of the object detection information by the object detecting means. When the sample moving mechanism moves according to a moving instruction from manual operation input means, the moving amount of the sample moving mechanism is restricted on the basis of the information about the calculated height of the sample to be observed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
