| 摘要 |
[Problems] To provide a polycrystalline silicon rod used for the recharging in the FZ method or the CZ method, the straight body portions thereof assuming an easily transferable shape and excelling in transferability. [Means for Solution] The polycrystalline silicon rod is obtained by depositing and growing silicon, by the chemical vapor-phase deposition method, on a silicon core member which includes a pair of silicon rods erected on the electrodes and a bridging portion connecting the upper ends of the silicon rods, wherein the straight body portions of the silicon rod erected on the electrodes have a diameter profile in the lengthwise direction thereof, and a minimum diameter is adjusted to be 60 to 95% of a maximum diameter.
|
