| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve and stabilize measurement accuracy by maintaining DC potential of a capacitor with a movable electrode in a variable capacitance displacement gauge. <P>SOLUTION: In the variable capacitance displacement gauge of the present invention, a capacitor M1 has an electrode on one end side being potentially fixed with respect to the ground by being grounded via a resistance R100, and has an electrode on the other side being potentially fixed with respect to the ground by being grounded via a coil T1. One side of the capacitor M1 can be directly grounded. Furthermore, the DC power to the capacitor M1 is interrupted by a capacitor C100 placed therebetween. <P>COPYRIGHT: (C)2012,JPO&INPIT |
