INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a device and a method to inspect height variations of a sample.

SOLUTION: An inspection device comprises: a holder 211 holding a sample 29; a charge control unit 23 which electrically charges the sample 29 held by the holder 211; a retarding power supply 24 which applies a voltage to the sample 29 held by the holder 211; an electron optical system 20 which irradiates an electron beam toward the sample 29 supplied with the voltage from the retarding power supply 24, thereby causing mirror electrons retracted from the vicinity of a surface of the sample 29 to form an image; and an image processing unit 27 which processes a mirror image formed by the mirror electrons. The image processing unit 27 outputs, as height variations of the sample 29, information based on a difference between the mirror image formed by the mirror electrons and a standard mirror image prepared in advance.

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