发明名称 TEMPLATE MATCHING PROCESSING DEVICE AND TEMPLATE MATCHING PROCESSING PROGRAM
摘要 Disclosed is a template matching processing device which is capable of calculating a corresponding coincidence degree in template matching between a design image and a captured image, even in the case where a shape change is great. In the template matching processing device, matching processing between a design image and a captured image is performed to cut out a partial design image which is cut out as a highest correlation part (Step 101), processing for changing the captured image in accordance with the cut-out design image is performed (Steps 102 to 105), and a coincidence degree is detected by determining the correlation between the changed image and the design image.
申请公布号 WO2011138882(A1) 申请公布日期 2011.11.10
申请号 WO2011JP56444 申请日期 2011.03.17
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION;TAGUCHI, JUN'ICHI;IKEDA, MITSUJI;ABE, YUICHI;KITAZAWA, MASAHIRO;NAGATOMO, WATARU 发明人 TAGUCHI, JUN'ICHI;IKEDA, MITSUJI;ABE, YUICHI;KITAZAWA, MASAHIRO;NAGATOMO, WATARU
分类号 G06T7/00;G01B11/00;G01B15/00;H01L21/66 主分类号 G06T7/00
代理机构 代理人
主权项
地址