发明名称 SEMICONDUCTOR DICE INCLUDING AT LEAST ONE BLIND HOLE, WAFERS INCLUDING SUCH SEMICONDUCTOR DICE, AND INTERMEDIATE PRODUCTS MADE WHILE FORMING AT LEAST ONE BLIND HOLE IN A SUBSTRATE
摘要 Semiconductor dice comprise at least one bond pad on an active surface of the semiconductor die. At least one blind hole extends from a back surface of the semiconductor die opposing the active surface, through a thickness of the semiconductor die, to an underside of the at least one bond pad. At least one quantity of passivation material covers at least a sidewall surface of the at least one blind hole. At least one conductive material is disposed in the at least one blind hole adjacent and in electrical communication with the at least one bond pad and adjacent the at least one quantity of passivation material.
申请公布号 US2011272806(A1) 申请公布日期 2011.11.10
申请号 US201113187133 申请日期 2011.07.20
申请人 MICRON TECHNOLOGY, INC. 发明人 AKRAM SALMAN;RIGG SIDNEY B.
分类号 H01L23/498;H01L23/48;H01L23/485 主分类号 H01L23/498
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