PRESSURE SENSOR USING A FLEXIBLE SUBSTRATE, AND METHOD FOR MANUFACTURING A 5.1 CHANNEL MICROPHONE USING SAME

摘要

The present invention relates to a pressure sensor using a flexible substrate, and to a method for manufacturing a 5.1 channel microphone using same. More particularly, the present invention relates to a pressure sensor using a flexible substrate and a method for manufacturing a 5.1 channel microphone using same, wherein the pressure sensor comprises: a first substrate having a center on which silicon nanowires serving as a sensing unit are formed; an electrode layer formed on the first substrate, which is divided into two parts by the sensing unit; a membrane which is formed on the first substrate and coated into a structure for exposing the electrode layer; a flexible substrate which is formed on the membrane, and portions of which correspond to the electrode layer and the sensing unit, wherein said portions are removed through a photo-etching process; and a cap formed beneath the first substrate and which is abraded until the membrane of the sensing unit is exposed, so as to form a cavity for vacuum or reference pressure in the sensing unit.