发明名称 CHUCKING TRAY CLAMPING/UNCLAMPING APPARATUS FOR OLED
摘要 PURPOSE: A method for clamping and unclamping a chucking tray for manufacturing an organic electroluminescent display device capable of automatically or semi-automatically clamping or unclamping a donor film are provided to prevent the fault of an apparatus element which is generated in a deposition process and a laminating process. CONSTITUTION: The body of an apparatus supports a chucking tray for chucking a film. A top pusher(240) pressurizes the tension unit(120) of the chucking tray in the lower part of the chucking tray. A top pusher power unit offers power to the top pusher. A lower pusher(220) pressurizes the clamping unit(110) of the chucking tray in the top of the chucking tray. A lower pusher power unit offers the power to the lower pusher.
申请公布号 KR20110122649(A) 申请公布日期 2011.11.10
申请号 KR20110083837 申请日期 2011.08.23
申请人 SFA ENGINEERING CORP. 发明人 PARK, MIN HO;KIM, HYUN JU;CHO, CHAN HEE;KIM, YOUNG MIN;JEON, YONG BAE
分类号 H01L51/56;H01L21/687 主分类号 H01L51/56
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