发明名称 Q-SWITCH LASER LIGHT-EMITTING APPARATUS, AND LASER ANNEALING METHOD AND DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a Q-switch laser light-emitting apparatus which can be small-sized while extending a pulse width of a Q-switch laser without enlarging a physical length of a resonator. <P>SOLUTION: Between a total reflecting mirror 13 and an output mirror 14, an electro-optical Q-switch element 11, a high refractive index material member 10 and a solid-state laser medium 12 are disposed in this order from the total reflecting mirror 13 toward the output mirror 14. Since both end faces 18a, 18b of the solid-state laser medium 12 on an optical axis are tilted at a Brewster angle with respect to the optical axis, laser light emitted from the solid-state laser medium 12 is not randomly polarized light but becomes linearly polarized light. Furthermore, since the high refractive index material member 10 is provided, an optical length of an optical path becomes short. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011228564(A) 申请公布日期 2011.11.10
申请号 JP20100098552 申请日期 2010.04.22
申请人 V TECHNOLOGY CO LTD 发明人 KAJIYAMA KOICHI;SHIRAISHI TETSUYA
分类号 H01S3/115;H01L21/20;H01L21/268;H01S3/00;H01S3/06 主分类号 H01S3/115
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