| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an infrared ray detecting sensor which eliminates the disadvantages of the existing sensor which is configured so that a micro-bridge of the infrared ray detecting sensor is supported by two beams obliquely extending, the disadvantages being that a sacrifice layer pattern for removing etching needs to be oblique after formation of the micro-bridge, reducing the size of pixels disadvantageously makes the angle of beams steep, and it is very likely that problems, such as a break of infrared ray detecting pattern formed at the beam part, occur when the beams extend at a steep angle, thereby reducing the reliability. <P>SOLUTION: <P>COPYRIGHT: (C)2012,JPO&INPIT |
