发明名称 |
A METHOD OF DEPOSITING NIOBIUM DOPED TITANIA FILM ON A SUBSTRATE AND THE COATED SUBSTRATE MADE THEREBY |
摘要 |
A coated article includes a pyrolytic applied transparent electrically conductive oxide film of niobium doped titanium oxide. The article can be made by using a coating mixture having a niobium precursor and a titanium precursor. The coating mixture is directed toward a heated substrate to decompose the coating mixture and to deposit a transparent electrically conductive niobium doped titanium oxide film on the surface of the heated substrate. In one embodiment of the invention, the method is practiced using a vaporized coating mixture including a vaporized niobium precursor; a vaporized titanium precursor, and a carrier gas to deposit a niobium doped titanium oxide film having a sheet resistance greater than 1.2 and an index of refraction of 2.3 or greater. The chemical formula for the niobium doped titanium oxide is Nb:TiOX where X is in the range of 1.8-2.1. |
申请公布号 |
WO2011139523(A2) |
申请公布日期 |
2011.11.10 |
申请号 |
WO2011US32645 |
申请日期 |
2011.04.15 |
申请人 |
PPG INDUSTRIES OHIO, INC. |
发明人 |
LU, SONGWEI;MCCAMY, JAMES W.;FINLEY, JAMES J. |
分类号 |
C03C17/00 |
主分类号 |
C03C17/00 |
代理机构 |
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代理人 |
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