发明名称 METHOD FOR MANUFACTURING CD1-XZNXTE -DETECTOR γ-AND X-RADIATION
摘要 A method for γ- and X-radiation semiconductor detector manufacturing comprises cutting high resistance monocrystal CdZnTe for plates, mechanical glazing, polishing, etching a sample in liquid-phase etchant comprising brome, and contacts deposition via sputtering contact metal using single pulse of technological laser. As a polishing etcher brome-release mixture of nitrate, hydrobromic and tartrat acids; in addition, mechanochemical polishing of semiconductor plate using brome-liberating etchant based on mixture of hydrogen peroxide, hydrobromic acid and ethylene glycol is performed during 2-4 min.
申请公布号 UA64429(U) 申请公布日期 2011.11.10
申请号 UA20110003823U 申请日期 2011.03.30
申请人 LASHKARIOV PHYSICS INSTITUTE OF SEMICONDUCTORS OFTHE NATIONAL ACADEMY OF SCIENCE OF UKRAINE 发明人 TOMASHYK ZINAIDA FEDORIVNA;TOMASHYK VASYL MYKOLAIOVYCH;STRATIICHUK IRYNA BORYSIVNA;HNATIV IVAN IVANOVYCH;LOTSKO OLEKSANDR PAVLOVYCH;KORBUTIAK DMYTRO VASYLIOVYCH;DEMCHYNA LIUBOMYR ANDRIIOVYCH;VAKHNIAK NADIA DMYTRIIVNA;KOMAR VITALII KORNIIOVYCH;DUBYNA NATALIIA HEORHIIVNA
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