发明名称 SEMICONDUCTOR DEVICE HAVING A BURIED GATE THAT CAN REALIZE A REDUCTION IN GATE-INDUCED DRAIN LEAKAGE (GIDL) AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device having a buried gate that can realize a reduction in gate-induced drain leakage is presented. The semiconductor device includes a semiconductor substrate, a buried gate, and a barrier layer. The semiconductor substrate has a groove. The buried gate is formed in a lower portion of the groove and has a lower portion wider than an upper portion. The barrier layer is formed on sidewalls of the upper portion of the buried gate.
申请公布号 US2011275188(A1) 申请公布日期 2011.11.10
申请号 US201113184887 申请日期 2011.07.18
申请人 HYNIX SEMICONDUCTOR INC. 发明人 YOO MIN SOO
分类号 H01L21/336 主分类号 H01L21/336
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