发明名称 SPECTROMETER
摘要 <P>PROBLEM TO BE SOLVED: To provide a spectrometer capable of obtaining accurate and stable spectral characteristics. <P>SOLUTION: A spectrometer (100) comprises: an objective optical system (11) capable of telecentrically imaging a target object without vignetting; a first transmission wavelength selective filter (12) formed to have a different transmission wavelength along a predetermined direction; a driving member for driving the first transmission wavelength selective filter; a projection optical system (15) for projecting a conjugate image of the target object image without vignetting; an aperture stop (153) provided in the objective optical system or the projection optical system (15), for allowing a telecentric transmission of a component used for image pickup without vignetting, out of the light flux that creates an object image onto the first transmission wavelength selective filter and transmits the filter; a two-dimensional image pickup device (16) for picking up the conjugate image; a storage for storing the conjugate image; and a measuring member for measuring the spectral characteristics of the target object. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011226876(A) 申请公布日期 2011.11.10
申请号 JP20100095692 申请日期 2010.04.19
申请人 NIKON CORP 发明人
分类号 G01J3/51;G01J3/26 主分类号 G01J3/51
代理机构 代理人
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