| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tuning-fork type piezoelectric vibration piece which has groove portions formed in vibration arms, and a piezoelectric device using the piezoelectric vibration piece. <P>SOLUTION: The tuning-fork type piezoelectric vibration piece 100 bonded in a package with a conductive adhesive includes a connection electrode electrically connected to the conductive adhesive, and a pair of vibration arms 12 extending from a base 11 made of a piezoelectric material in a predetermined direction and having excitation electrodes 53 electrically connected to the connection electrode formed thereon. Each of the vibration arms has a two-sided surface, being crossed at both sides of top and reverse surfaces, and also has a groove portion 23L or 23R, extending in the predetermined direction on the top and reverse surfaces respectively, the excitation electrodes have top and reverse electrodes 531R, 531L formed in the groove portions on the top and reverse surfaces respectively and side face electrodes 532R, 532L formed on the both side faces respectively, and the top and reverse electrodes have thinner film thicknesses than the connection electrode. <P>COPYRIGHT: (C)2012,JPO&INPIT |
