| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a wire grid polarizer having thin metal wires with excellent scratch resistance formed on fine ridges. <P>SOLUTION: A method for manufacturing a wire grid polarizer 1 includes a light-transmitting substrate 10 having a plurality of ridges 20 including a resin disposed in parallel with each other across a flat part 22 between the ridges 20 at a predetermined pitch Pp on the surface and thin metal wires 12 including a metal or a metal compound formed on the surface of the ridges 20. The method comprises successive steps of subjecting the surface of the side having the ridges 20 of the light-transmitting substrate 10 to a surface modification process (plasma treatment and the like) and selectively vapor-depositing the metal or the metal compound on the surface of the ridges 20 to form the narrow metal wires 12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
