摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a low temperature-fired ceramic sintered product which has high strength, high thermal conductivity and high Young's modulus, is dense, can be produced by firing at a low temperature of ≤1,000°C, and is useful as an insulating substrate having a wiring layer composed of low resistant conductors such as Cu, Ag, Au and Al on the surface or inside thereof. <P>SOLUTION: The sintered product includes, as crystal phases, (a) a gahnite crystal phase and/or spinel crystal phase, (b) a celsian crystal phase containing a needle-like crystal having an aspect ratio of ≥3 and (c) at least one crystal phase selected from the group consisting of AlN, Si<SB POS="POST">3</SB>N<SB POS="POST">4</SB>, SiC, Al<SB POS="POST">2</SB>O<SB POS="POST">3</SB>, ZrO<SB POS="POST">2</SB>, 3Al<SB POS="POST">2</SB>O<SB POS="POST">3</SB>-2SiO<SB POS="POST">2</SB>and Mg<SB POS="POST">2</SB>SiO<SB POS="POST">4</SB>, and has an open porosity of ≤0.3%. <P>COPYRIGHT: (C)2012,JPO&INPIT |