| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece carrying system for efficiently operating a whole system. <P>SOLUTION: A workpiece carrying system A1 includes three workpiece housing chambers 1 (1A to 1C) which are linearly arranged, a carrier chamber 2 adjacent to the workpiece housing chambers 1, a workpiece processing chamber 3 adjacent to a side opposite to the workpiece housing chambers 1 against the carrier chamber 2, two carrier robots 4A and 4B arranged in the carrier chamber 2 for carrying a workpiece W between the workpiece housing chamber 1 and the workpiece processing chamber 3, and a controller for controlling an operation of the carrier robots 4A and 4B. The carrier robot 4A carries the workpiece W to the workpiece housing chambers 1A and 1B, and the carrier robot 4B carries the workpiece W to the workpiece housing chambers 1B and 1C. The carrier robots 4A and 4B can carry the workpiece W in two systems in parallel by controlling an operation to prevent mutual collision by the controller. <P>COPYRIGHT: (C)2012,JPO&INPIT |
