| 发明名称 |
Nano-structured Gasket for Cold Weld Hermetic MEMS Package and Method of Manufacture |
| 摘要 |
A structure and method for cold weld compression bonding using a metallic nano-structured gasket is provided. This structure and method allows a hermetic package to be formed at lower pressures and temperatures than are possible using bulk or conventional thin-film gasket materials.
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| 申请公布号 |
US2011272796(A1) |
申请公布日期 |
2011.11.10 |
| 申请号 |
US20100874212 |
申请日期 |
2010.09.01 |
| 申请人 |
|
发明人 |
EATON MARK F.;POTTER CURTIS NATHAN;MINER ANDREW |
| 分类号 |
H01L23/02;H01L21/50 |
主分类号 |
H01L23/02 |
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