发明名称 Display element manufacturing method and manufacturing apparatus
摘要 The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.
申请公布号 US2011276306(A1) 申请公布日期 2011.11.10
申请号 US20100978976 申请日期 2010.12.27
申请人 发明人 HAMADA TOMOHIDE;NARA KEI
分类号 G06F15/00;C23C16/52 主分类号 G06F15/00
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