| 发明名称 |
HARDMASK COMPOSITION HAVING ANTIREFLECTIVE PROPERTIES AND METHOD OF PATTERNING MATERIAL ON SUBSTRATE USING THE SAME |
| 摘要 |
A hardmask composition includes an organic solvent and one or more aromatic ring-containing polymers represented by Formulae 1, 2 and 3:
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| 申请公布号 |
US2011275019(A1) |
申请公布日期 |
2011.11.10 |
| 申请号 |
US201113183261 |
申请日期 |
2011.07.14 |
| 申请人 |
CHEIL INDUSTRIES, INC. |
发明人 |
YOON KYONG HO;KIM JONG SEOB;UH DONG SEON;CHEON HWAN SUNG;OH CHANG IL;KIM MIN SOO;LEE JIN KUK |
| 分类号 |
G03F7/26;G02B5/22 |
主分类号 |
G03F7/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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