| 摘要 |
The invention relates to a titanium diboride target which contains fractions of one or more metals from the group consisting of iron, nickel, cobalt and chromium and also carbon. According to the invention, the mean grain size of the TiB2 grains is between 1 µm and 20 µm, the carbon content is in a range of 0.1 to 5% by weight and the total content of Fe, Ni, Co and/or Cr is in the range of 500 to 3000 µg/g. The carbon is distributed in free form at the grain boundaries of the TiB2 grains such that the mean distances between the individual carbon particles are less than 20 µm. The porosity is less than 5% by volume. |
