| 摘要 |
PROBLEM TO BE SOLVED: To provide a detection element and a detection method capable of detecting very small forces with high sensitivity by integrating a superconducting closed circuit with a mechanical structure. SOLUTION: The detection element comprises a silicon membrane 1 provided with a cantilever beam 11; the superconducting closed circuit 3 formed in a surface or the inside of the cantilever beam 11; a Josephson junction 4 inserted in the closed circuit 3; and a property change detection means for detecting deformation of the cantilever beam 11 on the basis of changes in a maximum superconducting current which can be made to flow through the superconducting closed circuit 3. The property change detection means is provided with a means for applying magnetic fields to the closed circuit 3; a means for applying a bias current to the closed circuit 3; and a means for detecting a voltage generated in the closed circuit 3. COPYRIGHT: (C)2008,JPO&INPIT |
