METHOD FOR SMOOTHING OPTICAL MEMBER FOR EUVL AND OPTICAL MEMBER FOR EUVL HAVING SMOOTHED OPTICAL SURFACE

摘要

The present invention provides a method for smoothing an optical surface of an optical component for EUVL. Specifically, the present invention provides a method for smoothing an optical surface of an optical component for EUVL made of a silica glass material containing TiO 2 and comprising SiO 2 as a main component with a laser having an oscillation wavelength, to which the optical component for EUVL has an absorption coefficient of 0.01 µm -1 or more, at a fluence of 0.3 to 1.5 J/cm 2 in an atmosphere having a water vapor partial pressure of 3.6 mmHg or less.