| 摘要 |
The vacuum pump riser (100) has an inlet (104), an outlet (106), a rotor (112) and a channel (108). A rotor section is provided with design elements (114,116), by which the pumping action is operated in molecular flow range according to Gaede principle and within a higher pressure range according to a side channel principle. An independent claim is also included for a vacuum pump, which has a high vacuum side pump riser and an atmospheric side pump riser. |
