| 摘要 |
An improved imprint device is disclosed. It comprises a drive component, an imprinting object, and at least one mold, stacked together within a chamber, a fluid supplier is used for providing the solvent fluid into the chamber through a pipe. The solvent fluid will permeate the imprinting object, and the imprinting object will be plasticized at the temperature lower than the glass transition temperature. The drive component is used for driving the mold to the plasticized imprinting object, so that the pattern on the mold will be imprinted on the imprinting object. It is the advantage of the present invention to reduce the process temperature, prevent the pattern distortion, and save the process time. Furthermore, by using the fluid and a barrier film as a pressing medium, the pressure can be applied to the object and the mold uniformly, such that a large area imprint can be achieved.
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