发明名称 Server device and program
摘要 A server device constituting a group management system includes one or more manufacturing apparatuses for performing a preset process on a target substrate, and the server device includes a measurement information storage unit for storing therein one or more measurement information; an instruction receiving unit for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit.
申请公布号 US8055391(B2) 申请公布日期 2011.11.08
申请号 US20070375693 申请日期 2007.07.09
申请人 TOKYO ELECTRON LIMITED 发明人 TAKAHASHI MASASHI;OBATA MINORU;KOYAMA NORIAKI
分类号 G06F11/00;B29C45/00;G05B11/01;G05D5/00;G06F19/00;H01L21/02;H01L21/205;H01L21/3065;H01L21/66;H03M13/00 主分类号 G06F11/00
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