发明名称 Chemical treatment apparatus
摘要 A chemical treatment apparatus includes an outer bath; an inner bath, located inside the outer bath; a circulation system, connecting the outer bath to the inner bath; and a draining system, having a first draining pipe and a connecting pipe, wherein the connecting pipe connects the first draining pipe to the circulation system. The suction force generated by a pump of the circulation system is thereby transferred to the first draining pipe. Therefore when the chemical solution is to be drained out from the inner bath, the draining of the chemical solution into the first draining pipe can be quickly done with the aid of the suction force.
申请公布号 US8052833(B2) 申请公布日期 2011.11.08
申请号 US20090401856 申请日期 2009.03.11
申请人 INOTERA MEMORIES, INC. 发明人 CHEN CHIA CHUN;YU WEN CHENG
分类号 C23C16/00;H01L21/00 主分类号 C23C16/00
代理机构 代理人
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