发明名称 Method for making thin film transistor comprising flocculating of carbon nanotubes
摘要 A method for making a thin film transistor, the method includes the steps of: providing a plurality of carbon nanotubes and an insulating substrate; flocculating the carbon nanotubes to acquire a carbon nanotube structure, applying the carbon nanotube structure on the insulating substrate; forming a source electrode, a drain electrode, and a gate electrode; and covering the carbon nanotube structure with an insulating layer. The source electrode and the drain electrode are connected to the carbon nanotube structure, the gate electrode is electrically insulated from the carbon nanotube structure by the insulating layer.
申请公布号 US8053291(B2) 申请公布日期 2011.11.08
申请号 US20090384310 申请日期 2009.04.02
申请人 TSINGHUA UNIVERSITY;HON HAI PRECISION INDUSTRY CO., LTD. 发明人 LIU CHANG-HONG;JIANG KAI-LI;LI QUN-QING;FAN SHOU-SHAN
分类号 H01L21/00;H01L21/84 主分类号 H01L21/00
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