发明名称 |
Ta/W film as heating device for dynamic fly height adjustment |
摘要 |
A dynamic fly heater (DFH) for improved lifetime and better film uniformity is disclosed for a magnetic head. The heater has a lower amorphous Ta layer and an upper W layer to promote small grain size and reduced electro-migration. The composite film is especially advantageous for heaters greater than 1000 Angstroms thick where dR/R is difficult to control in the prior art. The DFH may be a (Ta/W)n laminate in which the Ta layers are about 30 Angstroms thick and the combined thickness of the W layers is from 400 to 1200 Angstroms. A Ta film is preferably sputter deposited with an Ar pressure of 3 to 5 mTorr and the W film is sputter deposited in the same chamber with a 3 to 20 mTorr Ar pressure. In one embodiment, a merged read/write head has one DFH in the read head and a second DFH in the write head.
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申请公布号 |
US8054583(B2) |
申请公布日期 |
2011.11.08 |
申请号 |
US20080215825 |
申请日期 |
2008.06.30 |
申请人 |
HEADWAY TECHNOLOGIES, INC. |
发明人 |
ZHENG MIN;LI MIN;CHIEN CHEN-JUNG;LIU KOWANG;CHUNG SUNG |
分类号 |
G11B5/147 |
主分类号 |
G11B5/147 |
代理机构 |
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