FLOATING CONVEYING DEVICE, DIRECTION CHANGING DEVICE, AND FLOATING UNIT

摘要

PROBLEM TO BE SOLVED: To sufficiently prevent damages of a substrate W such as a crack and a scratch by avoiding an interference between the substrate W and a floating unit 17 or the like.

SOLUTION: Each floating unit 17 includes: a hollow floating unit leg 31 provided in an upper surface of a chamber 13; and a floating unit head 33 provided in an upper part of the floating unit leg 31 and having a cross section larger than a cross section of the floating unit leg 31. Any one of the floating units 17(E) is structured to be displaced from the center of the floating unit leg so as to protrude to a side surface of the chamber 13 corresponding to the floating unit head 33.

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