| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic field detection type physical quantity sensor that is improved in detection sensitivity, and a microphone. <P>SOLUTION: In a microphone 1 comprising a magnetic field generation unit 10 which generates a magnetic field to be detected, a magnetic field detection unit 4 which outputs an electric signal corresponding to a first directional component Hx of the magnetic field to be detected, and a vibrating thin film 3 which vibrates the magnetic field generation unit 10 and magnetic field detection unit 4 relatively in a second direction (y) crossing a first direction (x) according to vibration input from the outside, the magnetic field generation unit 10 comprises a first magnetic field generation unit 11 which is arranged on one side of the magnetic field detection unit 4 in the second direction y and generates a first magnetic field H1 between a pair of magnetic poles, and a second magnetic field generation unit 13 which is arranged on the other side of the magnetic field detection unit 4 in the second direction y and generates a second magnetic field H2 between the pair of magnetic poles. Consequently, the magnetic field to be detected which is a composite magnetic field of the first magnetic field H1 and second magnetic field H2 whose first directional components are opposite in direction is generated between the first magnetic field generation unit 11 and second magnetic field generation unit 13. <P>COPYRIGHT: (C)2012,JPO&INPIT |
