| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gripper which can prevent the structure of an electromagnetic actuator from being complicated as a result of using a position detector while relaxing shock when a thin planar matter is clamped by a clamp. <P>SOLUTION: The electromagnetic gripper 100 comprises a clamp 24 including a movable part 25 which moves a wafer 9 in the clamping direction, a spring member 30 which constantly urges the movable part 25 of the clamp 24 in the clamping direction, and an electromagnetic actuator 22 which generates thrust at least when transition is made from an unclamp state to a clamp state. The electromagnetic actuator 22 also includes an excitation circuit 28 having excitation coils 27a-27c which generate thrust in a direction of reducing moving speed of the movable part 25 which is increased by the urging force of the spring member 30 in the clamping direction when a transition is made from unclamp state to the clamp state. <P>COPYRIGHT: (C)2012,JPO&INPIT |
