| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface inspection tool and a method for the same. <P>SOLUTION: An inspection tool in an embodiment includes a light irradiation source generating scattered light including scattered light from the defects of a workpiece, which caused by guiding a light beam on the workpiece, scattered light according to a normal scattering pattern of the workpiece. In the embodiment, a programmable light selective array is included, which receives light scattered from the work piece and selectively guide the light scattered from the defects of the workpiece to a photosensor that converts this light into an electric signal. A processing circuit receives the electric signal from the photosensor and makes surface analysis of the workpiece which may include the characterization of defects. The programmable light selective array may include a reflector array and a filter array, although not being limited to them. The present invention also includes associated surface inspection methods. <P>COPYRIGHT: (C)2012,JPO&INPIT |
