MASK CLEANING DEVICE FOR ORGANIC EL, MANUFACTURING DEVICE OF ORGANIC EL-DISPLAY, AND MASK CLEANING METHOD FOR ORGANIC EL

摘要

PROBLEM TO BE SOLVED: To perform laser cleaning with improved cleaning degree of an organic material adhered to a mask for an organic EL in which a number of tapered opening portions are formed.

SOLUTION: A mask cleaning device for an organic EL includes a laser light source 31 which oscillates laser light L for scanning a surface of a mask 1 for an organic EL to peel off an organic material adhered to the surface of the mask 1 for an organic EL in which an opening portion 12 having a taper portion 12T is formed, and focus position adjusting means for adjusting a relative position relation of the surface of the mask 1 for an organic EL and a focus position of the laser light L so as to focus on an incident side of the laser light L rather than on the surface of the mask 1 for an organic EL. The laser light L, thereby, focuses on a position separated from the surface of the mask 1 for an organic EL to the incident side of the laser light L, and diffused light is able to be irradiated to the mask 1 for an organic EL so that the taper portion 12T is able to be irradiated with the laser light L at a large angle.

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