| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the risk of an operator in a work to relatively displace a probe card, a connection device, and a circuit device. <P>SOLUTION: A checker includes: a card table having a card reception part to removably receive the probe card; the connection device arranged in the upper part of the card table so as to be electrically connected to the probe card that is arranged in the card reception part; the circuit device that is arranged in the upper part of the connection device so as to be electrically connected to the connection device and also performs the delivery of a test signal with respect to the probe card via the connection device; a first driver for moving the card table and the connection device in a mutually approaching/separating direction so as to perform connection/separation between the card table and the connection device; and a second driver for moving the connection device and the circuit device in a mutually approaching/separating direction so as to perform connection/separation between the connection device and the circuit device. <P>COPYRIGHT: (C)2012,JPO&INPIT |
