| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a non-contact carrying device suitable to be used in a process step, allowing high-accuracy maintenance of a levitation height even in a large-size FPD or the like. <P>SOLUTION: In this non-contact carrying device 10, carrying faces 7j, 9j of base bodies 7, 9 each include two or more swirl flow formation bodies 1-4 each including a flow jetting port and each jetting a fluid from the fluid jetting port to generate an ascending swirl flow heading for a direction away from the surface on the surface side, and each base body includes fluid-sucking holes 8 around the swirl flow formation bodies. A line wherein the swirl flow formation bodies 1, 3 each generating the swirl flow of one direction and the fluid-sucking holes are alternately disposed along a width direction of the base body, and a line wherein the swirl flow formation bodies 2, 4 each generating the swirl flow of the other direction and the fluid-sucking holes are disposed along the width direction of the base body are alternately disposed along a longitudinal direction of the base body, so that the fluid-sucking holes can be positioned between the swirl flow formation bodies generating the swirl flows of the same direction positioned in the width direction and the longitudinal direction of the base body. <P>COPYRIGHT: (C)2012,JPO&INPIT |
