A HIGH-THROUGHPUT APPARATUS FOR MANUFACTURING SILICON INGOTS FOR THE POLYCRYSTALLINE SILICON SOLAR CELL

摘要

PURPOSE: An apparatus for manufacturing a high productive poly-crystal silicon ingot is provided to prevent an apparatus from being damaged or exploded by maintaining silicon to be safe by the end of a process with the separation of the silicon, which is flown out, in the lower part of a damaged crucible and. CONSTITUTION: A vacuum chamber(100) includes a crucible in which a poly-crystal silicon ingot is formed. The crucible is arranged to a horizontal direction to be separated. A susceptor(500) is fixed in the vacuum chamber by a support stand. A heating device(300) is included in the outside of each crucible and transfers radiant heat to the crucible. A cooling device(400) is included to cool the crucible.