发明名称 METHOD FOR MANUFACTURING RADIATION DETECTION ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-resolution radiation detection element with crosstalk suppressed without damaging scintillators. <P>SOLUTION: The method is one for manufacturing a radiation detection element including; a plurality of mutually separated first columnar scintillators; second columnar scintillators arranged between the respective first columnar scintillators and separated from the first columnar scintillators; and a plurality of light detection members positioned by superimposition on the first columnar scintillators. The method includes the steps of: preparing a substrate having a plurality of flat parts which are surrounded by irregularity parts and mutually separated; and forming the first columnar scintillators and the second columnar scintillators respectively on the flat parts and protrusions. Depth h of a recesses in an irregularity structure and distance d between protrusions satisfy a relational expression of h/d&le;1. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011220774(A) 申请公布日期 2011.11.04
申请号 JP20100088795 申请日期 2010.04.07
申请人 CANON INC 发明人 SAITO TATSUYA;HORIE RYOKO;YASUI NOBUHIRO;DEN TORU
分类号 G01T1/20;G21K4/00 主分类号 G01T1/20
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