MECHANICAL QUANTITY DETECTION DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a mechanical quantity detection device capable of avoiding instability of capacity detection characteristics due to a PN junction portion.

SOLUTION: A first electrode 301 is provided that has a hollow cylindrical first wall part 340 including oppositely arranged two diaphragms 341 and 342 on one face 201 of an insulation layer 200 and a first lid part 321 that closes an opening 346 of the first wall part 340. A second electrode 302 is provided that has a hollow cylindrical second wall part 350 including oppositely arranged two diaphragms 351 and 352 on one face 201 of the insulation layer 200 and a second lid part 322 that closes an opening 356 of the second wall part 350. One diaphragm 341 of the first wall part 340 is positioned opposite to one diaphragm 351 of the second wall part 350. Since the electrodes 301 and 302 are electrically separated on the insulation layer 200, no semiconductor region is required that makes each diaphragm of each wall part 340 and 350 function as an electrode.

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