| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a determination method which can determine an bromine element originated from impurities contained in chlorosilanes with high accuracy and at high speed and a manufacturing method of tetrachlorosilane. <P>SOLUTION: A method by using a hydrolysis apparatus (10) having four containers with capacity of 30-500 mL (11,12,13,14) includes a step (a) in which chlorosilanes and water react with each other so that a water solution containing a reaction product is contained, a step (b) in which the water solution is neutralized with an alkali compound and then the ion concentration of bromide in the water solution by using an ion chromatograph and a bromine element originated from impurities contained in the chlorosilanes is determined or a step (b') in which by using a induction coupling plasma mass analyzer (ICP-MS) the concentration of bromine element in the water solution is measured and a bromine element originated from impurities contained in the chlorosilanes is determined. By using the method, a bromine element originated from impurities contained in the chlorosilanes is determined. <P>COPYRIGHT: (C)2012,JPO&INPIT |
