| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tester and testing method which enable one to test silicon wafers for dirt with a simpler configuration and more simplified information processing. <P>SOLUTION: A silicon wafer dirt tester Sa according to the present invention includes: a light projecting section 1a which projects light onto the surface of a silicon wafer SW as a measurement target simultaneously from plural angles; an image-taking section 2 which takes an image of the surface of the silicon wafer SW on which light has been projected by the light projecting section 1; and a detecting section 31 which detects, as dirt, a region where the luminance of an image of the surface of the silicon wafer SW, which is obtained by the image-taking section 2, is a predetermined threshold value or lower. <P>COPYRIGHT: (C)2012,JPO&INPIT |
