| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mist cooling apparatus capable of preventing the apparatus from being damaged owing to heat from an object to be treated during an emergent state such as power failure, and to provide a heat treatment apparatus including the mist cooling apparatus. <P>SOLUTION: The mist cooling apparatus 3 includes a cooling system 30 provided with nozzles 35, 35A capable of spraying a cooling liquid in a mist state to an object M to be treated which has been heated and disposed in a cooling furnace 10, and a pump 33 which is driven by a drive source E and makes the cooling liquid flow toward th nozzles 35, 35A, and a second cooling system 40 which is driven in accordance with stop of the drive source E and cools the object M to be treated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
