| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas conveying device which can sufficiently secure a pressure difference between an inflow port and an outflow port without increasing its scale. <P>SOLUTION: A stacked body 10 includes an intermediate laminated body composed of insulator layers 93A to 93D in which comb teeth electrodes 910A to 910D and 920A to 920D are formed, respectively. Through holes TH are arranged and formed at the comb teeth electrodes-formed regions of the insulator layers 93A to 93D. Insulator layers 92, 94 formed with communication grooves communicating with the arranged and formed through holes TH at a prescribed pattern are disposed on both the sides in the lamination direction of the intermediate laminated body. Further, insulator layers 91, 95 provided with through holes TH to form into the inflow port and outflow port of gas are disposed at the outer layer. Pulse voltage signals V1 to V8 of 8 phases are applied to the comb teeth electrodes 910A to 910D and 920A to 920D. Gas is conveyed in a conveyance passage composed of through holes TH and the communication grooves by the pulse voltage signals. <P>COPYRIGHT: (C)2012,JPO&INPIT |
